Abstract:As an ideal material for efficient short-wavelength luminescence and laser devices, ZnO has witnessed great research progress in magnetics and electronics. However, researches on regulation of the luminescence behavior of ZnO films in doped states are still rarely reported. This paper first introduces the fundamental structures and traits of ZnO-based thin films, then reviews the ZnO film preparation technologies and their advantages and disadvantages. Besides, adopting UV and visible light emission mechanisms, this paper discusses the luminescence mechanism and traits of Co and/or Sn doped ZnO films, and points out the effects of doping elements and doping levels on the band structure of ZnO thin films. Finally, it describes the applications and the future development of ZnO-based thin films.